Altering the sulfur content in the propanethiol plasma polymers using the capacitive-to-inductive mode transition in inductively coupled plasma discharge

作者：Thiry Damien^*; Britun Nikolay; Konstantinidis Stephanos; Dauchot Jean Pierre; Denis Laurent; Snyders Rony

来源：Applied Physics Letters, 2012, 100(7): 071604.

DOI：10.1063/1.3686902

The effect of the transition from capacitive (E) to inductive (H) mode on propanethiol plasma polymer films properties was investigated by optical emission as well as by x-ray photoelectron spectroscopy. The E mode is characterized by low deposition rate and by high sulfur content in the films (similar to 40% vs similar to 20% in H mode). After aging, a strong decrease of sulfur to carbon content (from similar to 0.75 to 0.13), attributed to desorption of unbounded sulfur-based molecules (e. g., H2S), is detected at low power in E mode. The importance of the E-H transition for altering the film properties is highlighted.

• 出版日期2012-2-13