Modification of the optical properties of ZnO thin films by proton implantation

作者：Ham Yong Ju; Park Jun Kue; Lee W; Lee Cheol Eui^*; Park W

来源：Materials Research Bulletin, 2012, 47(9): 2403-2406.

DOI：10.1016/j.materresbull.2012.05.029

• ZnO film
• Proton implantation
• Optical properties

Optical properties of proton-implanted ZnO thin film prepared by radio-frequency (rf) magneton sputtering have been studied, the optical constants being obtained from the reflectance measurements by employing Cauchy-Urbach model. Increase in the ordinary refractive index after proton implantation was explained by that in the polarizability. Besides, a slight increase in the optical band gap by proton implantation was identified and discussed in terms of the hydrogen shallow donors introduced by the proton implantation.

• 出版日期2012-9