Novel Fabrication of Flexible Graphene-Based Chemical Sensors with Heaters using Soft Lithographic Patterning Method

作者：Jung Min Wook; Myung Sung; Song Wooseok; Kang Min A; Kim Sung Ho; Yang Cheol Soo; Lee Sun Sook; Lim Jongsun; Park Chong Yun; Lee Jeong O; An Ki Seok^*

来源：ACS Applied Materials & Interfaces, 2014, 6(16): 13319-13323.

DOI：10.1021/am502281t

• graphene sensor
• graphene heater
• soft lithographic patterning

We have fabricated graphene-based chemical sensors with flexible heaters for the highly sensitive detection of specific gases. We believe that increasing the temperature of the graphene surface significantly enhanced the electrical signal change of the graphene-based channel, and reduced the recovery time needed to obtain a normal state of equilibrium. In addition, a simple and efficient soft lithographic patterning process was developed via surface energy modification for advanced, graphene-based flexible devices, such as gas sensors. As a proof of concept, we demonstrated the high sensitivity of NO2 gas sensors based on graphene nanosheets. These devices were fabricated using a simple soft-lithographic patterning method, where flexible graphene heaters adjacent to the channel of sensing graphene were utilized to control graphene temperature.

• 出版日期2014-8-27