A molecular kinetic model for the optical emission spectroscopy technique in inductively coupled nitrogen plasma

作者：Zhu XM^*; Pu YK

来源：Physics of Plasmas, 2006, 13(6): 063507.

DOI：10.1063/1.2207124

A molecular kinetic model used for the line-ratio technique of optical emission spectroscopy to determine electron temperature in an inductively coupled nitrogen plasma is investigated in the pressure range 0.4-100 mTorr. Using the electron temperature and electron density measured by a Langmuir probe, the calculated line ratios are found to be in agreement with those measured by a spectrometer. Using this model, the relative contribution of various kinetic processes to the particle balance is analyzed over the whole pressure range.

• 出版日期2006-6
• 单位清华大学