Nanomechanical investigation of thin-film electroceramic/metal-organic framework multilayers

作者：Best James P^*; Michler Johann; Liu Jianxi; Wang Zhengbang; Tsotsalas Manuel; Maeder Xavier; Roese Silvana; Oberst Vanessa; Liu Jinxuan; Walheim Stefan; Gliemann Hartmut; Weidler Peter G; Redel Engelbert; Woell Christof

来源：Applied Physics Letters, 2015, 107(10): 101902.

DOI：10.1063/1.4930141

Thin-film multilayer stacks of mechanically hard magnetron sputtered indium tin oxide (ITO) and mechanically soft highly porous surface anchored metal-organic framework (SURMOF) HKUST-1 were studied using nanoindentation. Crystalline, continuous, and monolithic surface anchored MOF thin films were fabricated using a liquid-phase epitaxial growth method. Control over respective fabrication processes allowed for tuning of the thickness of the thin film systems with a high degree of precision. It was found that the mechanical indentation of such thin films is significantly affected by the substrate properties; however, elastic parameters were able to be decoupled for constituent thin-film materials (E-ITO approximate to 96.7 GPa, EHKUST-1 approximate to 22.0 GPa). For indentation of multilayer stacks, it was found that as the layer thicknesses were increased, while holding the relative thickness of ITO and HKUST-1 constant, the resistance to deformation was significantly altered. Such an observation is likely due to small, albeit significant, changes in film texture, interfacial roughness, size effects, and controlling deformation mechanism as a result of increasing material deposition during processing. Such effects may have consequences regarding the rational mechanical design and utilization of MOF-based hybrid thin-film devices.

• 出版日期2015-9-7