Microstructure and optical properties of Gd2O3 thin films prepared by pulsed laser deposition

作者：Mishra Maneesha^*; Kuppusami P; Ramya S; Ganesan V; Singh Akash; Thirumurugesan R; Mohandas E

来源：Surface and Coatings Technology, 2015, 262: 56-63.

DOI：10.1016/j.surfcoat.2014.12.012

• Gadolinium oxide
• Pulsed laser deposition
• Optical properties
• X-ray diffraction

Gadolinium oxide (Gd2O3) thin films were deposited on Si (100) and quartz substrates at different substrate temperatures (300-873 K) and oxygen partial pressures (0.002-2 Pa) by pulsed laser deposition technique. The microstructure of the films was analyzed by X-ray diffraction (XRD), atomic force microscopy and Raman spectroscopy. The XRD pattern shows the presence of monoclinic phase of Gd2O3 as a major phase along with a small volume fraction of cubic phase at lower substrate temperatures. Optical transmittance and absorbance of the Gd2O3 films were measured by UV-visible spectrophotometer. The films deposited at different deposition conditions show a strong absorbance at similar to 220 nm and exhibit transmittance in the range of 70-90%. Highest value of band gap (similar to 5.80 eV) is obtained for the Gd2O3 film deposited at 873 K.

• 出版日期2015-1-25