Array of dielectric nanocomposite devices using photoepoxy Su-8 as the polymeric phase

作者：Li Fang; Wang Qing Ming^*

来源：Applied Physics Letters, 2006, 89(23): 232905.

DOI：10.1063/1.2402885

An array of dielectric nanocomposite devices in which negative tone photoepoxy Su-8 is used as the polymeric matrix and Ba0.5Sr0.5TO3 nanoparticles as the inclusions is fabricated on silicon substrate. The use of Su-8 necessitates a single step process for both the top electrode deposition and ultraviolet exposure using a shadow mask and direct-current magnetron sputtering in the device fabrication. Scanning electron microscopy examination indicates a uniform distribution of nanoparticles in Su-8 matrix. Effective dielectric constant of the nanocomposites increases with loading concentration with a good agreement with the Maxwell-Garnett and Bruggeman approximations at low concentrations, while dielectric loss is low for all compositions.

• 出版日期2006-12-4