DESIGN OF AN EFFICIENT MICROWAVE PLASMA REACTOR FOR BULK PRODUCTION OF INORGANIC NANOWIRES

作者：Kim Jeong H; Kumar Vivekanand; Chernomordik Boris; Sunkara Mahendra K^*

来源：Informacije Midem-Journal of Microelectronics Electronic Components and Materials, 2008, 38(4): 237-243.

• plasma
• atmospheric pressure
• microwave
• argon
• oxygen
• nanowire
• nanoparticle
• metal oxide

We report the design of an atmospheric microwave plasma reactor to produce metal oxide nanowires. The reactor has a custom-made tapered waveguide and a 2.45GHz, 3kW (MKS ASTeX) magnetron and power supply unit for generating highly dense microwave plasma. As a result, a high temperature microwave plasma flame inside a quartz tube of 2 in. diameter and 1 ft. length was generated to produce metal oxide nanowires and nanoparticles. High Frequency Structure Simulator (HFSS) software was used to simulate the electric field distribution inside the dielectric tube.

• 出版日期2008-12