科研之友
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摘要
We have studied a bottom-up ablation drilling with infrared femtosecond laser pulses. To avoid dust deposition inside the hole, we have investigated the role of focusing and scanning parameters, during the bottom-up ablation. The numerical aperture and pulse-to-pulse overlap were considered to determine an optimal ablation regime for each layer. Using these focusing conditions, a multiparametric study of laser fluence and vertical translation of focal spot was performed to determine conditions for efficient in-process dust removal. Drilling sapphire at these optimal parameters produces crack-free, chip-free, and low-tapered (< 3 degrees) holes. We demonstrated that these parameters can be used for scaling the process for repetition rates of 1MHz and higher.
- 出版日期2017-12
- 单位中国地震局
