Preparation of high-pressure phase boron nitride films by physical vapor deposition

作者：Zhu PW; He Z; Zhao YN; Li DM; Liu HW; Zou GT^*

来源：Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , 2002, 20(3): 622-624.

DOI：10.1116/1.1458948

The high-pressure phases boron nitride films together with cubic, wurtzic, and explosive high-pressure phases, were successfully deposited on the metal alloy substrates by tuned substrate radio frequency magnetron sputtering. The percentage of cubic boron nitride phase in the film was about 50% as calculated by Fourier transform infrared measurements. Infrared peak position of cubic boron nitride at 1006.3 cm(-1), which is close to the stressless state, indicates that the film has very low internal stress. Transition electron microscope micrograph shows that pure cubic boron nitride phase exits on the surface of the film. The growth mechanism of the BN films was also discussed.

• 出版日期2002-6
• 单位吉林大学