Development of an innovative magnetic-aided roller microtransfer replica process and a study of microstructure array replication

作者：Weng Y J^*; Huang J C; Chen T L

来源：Proceedings of the Institution of Mechanical Engineers - Part C: Journal of Mechanical Engineering Science , 2011, 225(C11): 2749-2758.

DOI：10.1177/0954406211406333

• magnetic-aided roller imprint
• microstructure array
• micromoulding technology
• array component
• microelectromechanical

This study proposed a type of innovative imprint replica process technique, by first developing a magnetic-aided roller microtransfer replica process equipment, and then using polydimethylsiloxane soft mould composite magnetic powder to create a roller for transfer imprint. Using the advantage of the even pressing of a magnetic roller, a microstructure array was used in this innovative manufacturing process for transfer replication study. Research results showed that, the magnetic-aided roller microtransfer machine developed in this study could successfully transfer a roller structure to polycarbonate film, thus resulting in an imprint effect. This study successfully applied this innovative manufacturing technology on a rolling microstructure array, and examined its replicability.

• 出版日期2011