Iterative roller imprint of multilayered nanostructures

作者：Nagato Keisuke^*; Sugimoto Shuntaro; Hamaguchi Tetsuya; Nakao Masayuki

来源：Microelectronic Engineering, 2010, 87(5-8): 1543-1545.

DOI：10.1016/j.mee.2009.11.029

• Roller
• Imprint
• Multilayered nanostructure

The authors demonstrated an iterative roller imprint method of multilayered nanostructures. A thermoplastic polymer film is imprinted using a nanostructured mold and heated rollers (first layer). The next imprinted thin film is thermally bonded on the backside of the first layer using other rollers. By repeating these processes, a multilayered nanostructure was fabricated. By this method, multilayered nanostructures with an 800 nm pitch line-and-space pattern were fabricated using polymethyl-methacrylate film of 800 nm thickness.

• 出版日期2010-8