Actuation of atomic force microscopy microcantilevers using contact acoustic nonlinearities

作者：Torello D; Degertekin F Levent^*

来源：Review of Scientific Instruments, 2013, 84(11): 113705.

DOI：10.1063/1.4832976

A new method of actuating atomic force microscopy (AFM) cantilevers is proposed in which a high frequency (>5 MHz) wave modulated by a lower frequency (similar to 300 kHz) wave passes through a contact acoustic nonlinearity at the contact interface between the actuator and the cantilever chip. The nonlinearity converts the high frequency, modulated signal to a low frequency drive signal suitable for actuation of tapping-mode AFM probes. The higher harmonic content of this signal is filtered out mechanically by the cantilever transfer function, providing for clean output. A custom probe holder was designed and constructed using rapid prototyping technologies and off-the-shelf components and was interfaced with an Asylum Research MFP-3D AFM, which was then used to evaluate the performance characteristics with respect to standard hardware and linear actuation techniques. Using a carrier frequency of 14.19 MHz, it was observed that the cantilever output was cleaner with this actuation technique and added no significant noise to the system. This setup, without any optimization, was determined to have an actuation bandwidth on the order of 10 MHz, suitable for high speed imaging applications. Using this method, an image was taken that demonstrates the viability of the technique and is compared favorably to images taken with a standard AFM setup.

• 出版日期2013-11