A study of diamond-like carbon thin films prepared by microwave plasma chemical vapour deposition

作者：Lai, Xiuqiong; Chen, Junfang^*; Fu, Silie; Li, Wei; Zhang, Maoping; Shi, Lei; Yang, Chunlin

来源：Plasma Science and Technology, 2007, 9(4): 444-447.

• plasma density
• Langmuir probe
• OES
• diamond-like carbon thin films

In order to deposit good films, we need to study the uniformity of plasma density and the plasma density under different gas pressures and powers. The plasma density was diagnosed by a Langmuir probe. The optical emission spectroscopy (OES) of CH4 and H-2 discharge was obtained with raster spectroscopy, with characteristic peaks of H and CH achieved. Diamond-like carbon films were achieved based on the study of plasma density and OES and characterized by atomic force microscope (AFM), X-ray diffraction instrument (XRD), Raman spectroscope and profiler.

• 出版日期2007-8
• 单位华南师范大学