Decomposition of silicon tetrachloride by microwave plasma jet at atmospheric pressure

作者：Wu Lifeng^*; Ma Zhibin; He Aihua; Wang Jianhua

来源：Inorganic Materials, 2009, 45(12): 1403-1407.

DOI：10.1134/S0020168509120188

A new method for destroying silicon tetrachloride has been developed, which based on a microwave plasma jet that operates at atmospheric pressure using hydrogen as work gas. Experiments showed that the silicon tetrachloride was dissociated into silicon and hydrogen chloride under the effect of the plasma jet. The silicon was deposited on the molybdenum substrate of the plasma reactor, which was yellow and typical nanosized particles. These solid samples have been analyzed by SEM, EDX, XRD, FT-IR and the active particle in the plasma is detected by atomic emission spectroscopy. The results show that the silicon tetrachloride is mainly transformed into nano-silicon with size of 54 nm. The dissociation efficiency reaches 50%.

• 出版日期2009-12
• 单位武汉工程大学