摘要

This study investigates the underlying mechanisms of multiple conductive filaments (CF) creation in metal-ion based conductive bridge RRAM (CBRAM) by using the Metropolis Monte Carlo algorithm and suggests a possible explanation for this phenomenon. The simulation method is demonstrated over a Cu/HfO2 structure, starting from a random initial distribution of oxygen vacancies (OV) defects in the resistive switching layer, to a formed CF and ending in a ruptured state. the results indicate that "Hot Spots" (HS), where agglomeration of OV trap like states for electron hopping based conduction induce local heating, create favorable energy conditions to attract diffused metal species originating from the top electrode. While HS may be created and annihilated by random OV generation and recombination processes, the precipitated metal forms a stem out of which a CF could evolve. The CF stem's final growth stage is mainly driven by drift and diffusion. This process may lead to the formation of one or more CFs as a function of the forming bias voltage. This bias dependence is demonstrated over a large range, where the creation of a single, double and multiple CFs are shown. In addition, the reset process of the multi CF device is presented, and the experimentally observed, step like, gradual CBRAM reset is verified. The simulated results are in good agreement with experimental data and promote the idea that OV defect engineering may be used to improve CBRAM performance.

  • 出版日期2016-2