Post-CMOS wafer level growth of carbon nanotubes for low-cost microsensors-a proof of concept

作者：Santra Sumita^*; Ali Syed Z; Guha Prasanta K; Zhong Guofang; Robertson John; Covington James A; Milne William I; Gardner Julian W; Udrea Florin

来源：Nanotechnology, 2010, 21(48): 485301.

DOI：10.1088/0957-4484/21/48/485301

Here we demonstrate a novel technique to grow carbon nanotubes (CNTs) on addressable localized areas, at wafer level, on a fully processed CMOS substrate. The CNTs were grown using tungsten micro-heaters (local growth technique) at elevated temperature on wafer scale by connecting adjacent micro-heaters through metal tracks in the scribe lane. The electrical and optical characterization show that the CNTs are identical and reproducible. We believe this wafer level integration of CNTs with CMOS circuitry enables the low-cost mass production of CNT sensors, such as chemical sensors.

• 出版日期2010-12-3