Microstructural Studies of Nanocomposite Thin Films of Ni/CrN Prepared by Reactive Magnetron Sputtering

作者：Kuppusami P^*; Thirumurugesan R; Divakar R; Kataria S; Ramaseshan R; Mohandas E

来源：Journal of Nanoscience and Nanotechnology, 2009, 9(9): 5592-5595.

DOI：10.1166/jnn.2009.1131

• Magnetron Sputtering
• Nanocomposite Films
• Chromium Nitride
• X-ray Diffraction
• Transmission Electron Microscopy
• Mechanical Properties

Synthesis and characterization of nanocomposites of Ni/CrN thin films prepared by DC magnetron sputtering from a target of 50 wt.%Ni-50 wt.%Cr is investigated. The films prepared as a function of nitrogen flow rate and substrate temperature showed that the films contained Ni and CrN phases with crystallite sizes in the nanometer range. Measurement of nanomechanical properties of the composite films exhibited a significant decrease in the values of hardness and Young's modulus than those of pure CrN films.

• 出版日期2009-9