Noncontact acousto-electromagnetic measurement of mechanical resonance in electronic systems

作者:Huangfu, J. T.*; Zheng, X. C.; Wang, X. B.; Wang, J. Y.; Wang, Y. S.; Ran, L. X.
来源:Journal of Electromagnetic Waves and Applications, 2012, 26(11-12): 1407-1411.
DOI:10.1080/09205071.2012.700890

摘要

In this paper, we present a noncontact, acousto-electromagnetic approach for the measurement of mechanical resonance. An acoustic wave is used to vibrate the device under test (DUT), and the vibration is then detected by an active radio frequency sensor. Because both the vibration and detection are performed in a noncontact way and therefore have no external impact on the DUT's mechanical resonance, the DUT's natural zero-loaded resonance frequency can thus be precisely measured.

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