Depth profiling by cluster projectiles as seen by computer simulations

作者：Postawa Z^*; Rzeznik L; Paruch R; Russo M F; Winograd N; Garrison B J

来源：Surface and Interface Analysis, 2011, 43(1-2): 12-15.

DOI：10.1002/sia.3417

• molecular dynamics simulations
• SIMS
• cluster bombardment
• depth profiling

Molecular dynamics computer simulations are used to probe the development of the surface morphology and the processes that determine the depth resolution in depth profiling experiments performed by secondary ion and neutralmass spectrometry (SIMS/SNMS). The Ag(111) surface is irradiated by an impact of 20-keV Au-3, C-60 and Ar-872 clusters that represent a broad range of cluster projectiles used in SIMS/SNMS experiments. Improvements in the simulation protocol including automation and optimal sample shape allow for at least 1000 consecutive impacts for each set of initial conditions. This novel approach allows to shrink the gap between single-impact simulations and real experiments in which numerous impacts are used.

• 出版日期2011-2