A push-pull double-contact MEMS relay fabricated by MetalMUMPs process

作者：Wang, Lifeng^*; Jin, Yue

来源：Microsystem Technologies, 2017, 23(6): 2257-2262.

DOI：10.1007/s00542-016-3001-5

• SWITCH
• MICRORELAYS

This document presents a push-pull double-contact MEMS (Micro ElectroMechanical System) relay. The MEMS relay is electrostatic driven and laterally actuating. Two push-pull structures form two parallel contacts for the proposed MEMS relay, which can make the contact resistance of the MEMS relay be smaller. The push and pull actions of the push-pull actuators can be accomplished simultaneously using only one action signal. In addition, high inductance DC bias line and substrate removal are used for additional electrical and/or thermal isolation. The fabrication of the proposed switch is based on the standard MetalMUMPs process. The measured pull-in voltage is 116 V and the switch-ON delay is 44 mu s. Contact resistance of the MEMS relay is less than 1 Omega when the stress voltage exceeds 120 V.

• 出版日期2017-6
• 单位东南大学