摘要

We present an eddy current angle sensor for high-pressure electrohydraulic rotary valves. An oblique ring-shaped sensing coil and a symmetric semi-cylindrical rotor are utilized, making the coil impedance and the output voltage proportional to the angular displacements. Analysis based on an electrical equivalent circuit and the finite-element method is provided, and good agreement is obtained between the simulated and measured results. Extensive experiments have shown that the sensor has a linear working range of about 30 degrees with nonlinearity 0.8% and temperature drift less than 1% over 30 degrees C-90 degrees C.