Nanopipe fabrication using vertically aligned carbon nanofiber templates

作者：Melechko **^*; McKnight TE; Guillorn MA; Austin DW; Ilic B; Merkulov VI; Doktycz MJ; Lowndes DH; Simpson ML

来源：Journal of Vacuum Science and Technology B, 2002, 20(6): 2730-2733.

DOI：10.1116/1.1515306

We report a method to fabricate tubular nanostructures using vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition as templates. The resulting nanopipes are oriented perpendicular to the substrate and have internal diameters ranging from 30 to 200 nm and can be up to several micrometers in length. These nanopipes can be deterministically positioned on a substrate and arranged into singular devices or arrays.

• 出版日期2002-12