The Materials Challenge in Diffraction-Unlimited Direct-Laser-Writing Optical Lithography

作者:Fischer Joachim*; von Freymann Georg; Wegener Martin
来源:Advanced Materials, 2010, 22(32): 3578-+.
DOI:10.1002/adma.201000892

摘要

Using a novel photoresist (composed of pentaerythritol triacrylate and isopropyl thioxanthone) that favors stimulated emission depletion by a pi-pi* transition and using a two-color two-photon excitation scheme, 65-nm wide lines are achieved. This value is limited by parasitic two-photon absorption of the continuous-wave depletion beam. It is estimated that, without this process, line widths of 30 nm are in reach.

  • 出版日期2010-8-24