High-Performance Zinc Oxide Transistors and Circuits Fabricated by Spray Pyrolysis in Ambient Atmosphere

作者:Bashir Aneeqa; Woebkenberg Paul H; Smith Jeremy; Ball James M; Adamopoulos George; Bradley Donal D C; Anthopoulos Thomas D*
来源:Advanced Materials, 2009, 21(21): 2226-+.
DOI:10.1002/adma.200803584

摘要

The use of a simple deposition technique, namely spray pyrolysis, for the fabrication of high-mobility, low-voltage ZnO transistors and simple integrated circuits is demonstrated. The method is compatible with large-area deposition and could potentially address both the issue of manufacturing cost and high operating voltages.

  • 出版日期2009-6-5