Homogeneous Si0.5Ge0.5 bulk crystal growth as substrates for strained Ge thin films by the traveling liquidus-zone method

作者：Kinoshita Kyoichi^*; Nakatsuka Osamu; Yoda Shinichi; Zaima Shigeaki

来源：Thin Solid Films, 2012, 520(8): 3279-3282.

DOI：10.1016/j.tsf.2011.08.047

• Zone growth
• Solid solution
• Si0.5Ge0.5
• Bulk crystal
• Substrate

Compositionally uniform Si0.5Ge0.5 bulk crystals were grown by the traveling liquidus-zone method which we developed for alloy crystal growth. Grown crystals were characterized as substrates for compressive-strained Ge thin films for high mobility p-channels of complementary metal oxide semiconductor transistors. Compositional uniformity was excellent and crystallinity was also excellent for 10 mm diameter crystals. However, crystallinity was degraded for 30 mm diameter crystals although compositional uniformity was excellent. Transmission electron microscope (TEM) observation showed high dislocation density at the interface between a Si seed and a grown crystal due to lattice mismatch. However, the dislocation density decreased as crystal growth proceeded. High quality 30 mm diameter crystals will be grown when the single crystal length is extended judging from TEM results. In this paper, we report on the growth and characterization of Si0.5Ge0.5 crystals as substrates for strained Ge thin films.

• 出版日期2012-2-1