Multiple UV-blue luminescence emissions in electrochemical anodic etched n-type silicon wafer

作者：Zhang, Yunsen; Yang, Zhimei; Niu, Donglai; Nie, Eryong; Bai, Xue; Jiao, Zhifeng; Jin, Yong; Gong, Min; Sun, Xiaosong^*

来源：Applied Surface Science, 2010, 256(10): 3325-3329.

DOI：10.1016/j.apsusc.2009.12.028

• Anodic chemical etching
• n-Type silicon
• UV-blue photoluminescence
• Silicon oxide coating

This very paper is focusing on the preparation of porous nanostructures in n-type silicon (1 1 1) wafer by chemical etching technique in alkaline aqueous solutions of 5 M NaOH, 5 M K2CO3 and 5 M K3PO4, and particularly, on its ultraviolet-blue photoluminescence emission. The anodic chemical etched silicon wafer has been characterized by means of optical microscopy, scanning electron microscopy, fluorescence spectroscopy, atomic force microscopy and Fourier transform infrared spectroscopy. This very surface morphology characterization has been clearly shown - the effect of anodic-chemical-etching procedure processed in K2CO3 or K3PO4 was much vigorous than that processed in NaOH. The FTIR spectra indicate that the silicon oxide was formed on the surface of electrochemical etched n-Si (1 1 1) wafers, yet not on that of the pure chemical etched ones anyhow. And an intense ultraviolet-blue photoluminescence emission is observed, which then differs well from the silicon specimen etched in alkaline solution with no anodic potential applied. The proper photoluminescence mechanism is discussed, and hence there may be a belief that the intense ultraviolet-blue photoluminescence emission would be attributed to the silicon oxide coating formed on silicon wafer in anodic-chemical-etching process.

• 出版日期2010-3-1
• 单位四川大学