H2S molecular beam passivation of Ge(001)

作者：Merckling C^*; Chang Y C; Lu C Y; Penaud J; El Kazzi M; Bellenger F; Brammertz G; Hong M; Kwo J; Meuris M; Dekoster J; Heyns M M; Caymax M

来源：Microelectronic Engineering, 2011, 88(4): 399-402.

DOI：10.1016/j.mee.2010.09.012

• Passivation
• H2S
• Molecular beam epitaxy
• High-mu semiconductors

A fundamental issue regarding the introduction of high-mobility Ge channels in CMOS circuits is the electrical passivation of the interface with the high-k gate dielectric. In this paper, we investigate the passivation of p-Ge(0 0 1) using molecular H2S. The modification of the semiconductor surface is monitored in situ by RHEED and the interface is characterized by XPS analyses. MOS capacitors are fabricated to extract interface state density, and finally we demonstrate the efficiency of the passivation scheme using a combination with an ultra thin Al interlayer.

• 出版日期2011-4
• 单位清华大学