2D spectroscopic observation on effect of nitrogen species on CH abundance and morphology of carbonaceous film by plasma-enhanced CVD

作者：Shen Qingchun^*; Miyata Yasushi; Suzuki Toshiki; Morita Shigeaki; Kitagawa Kuniyuki

来源：Microchemical Journal, 2013, 106: 373-377.

DOI：10.1016/j.microc.2012.10.001

• Spectroscopic visualization
• Carbon electrode
• Plasma enhanced chemical vapour deposition

In our previous work, a method entitled %26quot;2D Visualization%26quot; was proposed to diagnose CH4/H-2 plasmas and successfully applied to demonstrate the profile of CH radicals that dominated the microstructure of the resultant films. To synthesize higher density carbon electrodes for lithium-ion batteries. N-2 was employed as a reaction control gas to enrich the density of CH in this present study. Two-dimensional distribution of CH radicals in the plasma was successfully reconstructed by means of spectroscopic visualization. Emission intensities of spontaneous radiation arising from CH in the plasma were captured by a CCD camera through an optical band-pass filter with a transmission wavelength of 430 nm. Surface morphology of the obtained electrode was observed using scanning electron microscope (SEM). Correlation between the plasma condition as well as the feeding gas condition and the morphology of the target surface is discussed. It was clarified that CH density in the CH4/N-2 plasma was higher than that in CH4/H-2 plasma and strongly depends on nitrogen molar ratio in the feeding gas, and that surface morphology of the target was controlled not only by the density of carbon-containing species such as CH but also by their excitation temperature in the plasma.

• 出版日期2013-1