A method for accurate temperature measurement using infrared thermal camera

作者：Tokunaga Tomoharu^*; Narushima Takashi; Yonezawa Tetsu; Sudo Takayuki; Okubo Shuichi; Komatsubara Shigeyuki; Sasaki Katsuhiro; Yamamoto Takahisa

来源：Journal of Electron Microscopy, 2012, 61(4): 223-227.

DOI：10.1093/jmicro/dfs042

• temperature measurement
• temperature distribution
• heater
• infrared radiation
• thermal camera
• electron microscopy

The temperature distribution on a centre-holed thin foil of molybdenum, used as a sample and heated using a sample-heating holder for electron microscopy, was measured using an infrared thermal camera. The temperature on the heated foil area located near the heating stage of the heating holder is almost equal to the temperature on the heating stage. However, during the measurement of the temperature at the edge of the hole of the foil located farthest from the heating stage, a drop in temperature should be taken into consideration; however, so far, no method has been developed to locally measure the temperature distribution on the heated sample. In this study, a method for the accurate measurement of temperature distribution on heated samples for electron microscopy is discussed.

• 出版日期2012-8