摘要

The piezoelectric linear motor based on piezoelectric ceramic stack has a potential application in high-tech fields such as optical waveguide packaging. Mechanical properties of piezoelectric linear motors in the existing researches still need to be improved. A three-phase driving alternate stepping piezoelectric linear motor was proposed. The operation principle of this novel linear motor was analyzed. The motor's output characteristics driven by three-phase square and triangular waves (two square waves with contrary phase and a triangular wave) were theoretically compared to the situation when it was driven by four-phase sine waves. The impact of preload on the motor was analyzed. The holding structure stiffness was analyzed using the finite element method. Based on the analysis results, a prototype was fabricated and its mechanical properties were tested which proves that the principle is feasible. When the motor is driven by three-phase square and triangular waves and four-phase sine waves at a voltage of 100V (peak to peak value), and frequency of 100Hz, the speed without load are 0.502 mm/s and 0.432 mm/s and the maximum output forces are 4.63N and 3.73N. The mechanical properties of the motor have been improved.

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