Adjustment of ablation shapes and subwavelength ripples based on electron dynamics control by designing femtosecond laser pulse trains

作者：Yuan, Yanping^*; Jiang, Lan; Li, Xin; Wang, Cong; Lu, Yongfeng

来源：Journal of Applied Physics, 2012, 112(10): 103103.

DOI：10.1063/1.4765671

• PERIODIC SURFACE-STRUCTURE
• MANIPULATION
• OPTIMIZATION
• SILICON
• METALS
• DAMAGE

A quantum model is proposed to investigate femtosecond laser pulse trains processing of dielectrics by including the plasma model with the consideration of laser particle-wave duality. Central wavelengths (400 nm and 800 nm) strongly impact the surface plasmon field distribution, the coupling field intensity distribution (between the absorbed intensity and the surface plasma), and the distribution of transient localized free electron density in the material. This, in turn, significantly changes the localized transient optical/thermal properties during laser materials processing. The effects of central wavelengths on ablation shapes and subwavelength ripples are discussed. The simulation results show that: (1) ablation shapes and the spacing of subwavelength ripples can be adjusted by localized transient electron dynamics control using femtosecond laser pulse trains; (2) the adjustment of the radii of ablation shapes is stronger than that of the periods of subwavelength ripples.

• 出版日期2012-11-15
• 单位北京理工大学