An Analytical Approach to Modeling Static Behavior of Torsional Nano-/Micro-actuators under Effect of van der Waals Force

作者：Moeenfard Hamid^*; Darvishian Ali; Ahmaidan Mohammad Taghi; Zohoor Hassan

来源：Japanese Journal of Applied Physics, 2012, 51(3): 037201.

DOI：10.1143/JJAP.51.037201

In this research, the static behavior of torsional nano-/micro-actuators under van der Waals (vdW) force is studied. First, the equilibrium equation governing the static behavior of torsional nano-/micro-actuators under vdW force is obtained. Then the energy method is utilized to investigate the statical stability of nano-/micro-actuator equilibrium points and a useful equation is suggested for the successful and stable design of nano-/micro-actuators under vdW force. Then, the equilibrium angle of nano-/micro-actuators is calculated both numerically and analytically using the homotopy perturbation method (HPM). It is observed that, with increasing instability number, defined in this paper, the rotation angle of the actuator is increased and pull-in suddenly occurs. Since analytical results are in good agreement with the numerical ones, the analytical method presented in this paper can be used as a fast, precise, and stable design tool in nano-/micro-actuators under vdW force.

• 出版日期2012-3