Monitoring texture formation during diamond growth by specular and diffuse reflectance interferometry

作者：Delfaure Colin^*; Tranchant Nicolas; Mazellier Jean Paul; Ponard Pascal; Saada Samuel

来源：Diamond and Related Materials, 2016, 69: 214-220.

DOI：10.1016/j.diamond.2016.08.013

• Diamond growth
• Texture
• Sequential synthesis
• LRI
• Scattered light

This paper is aimed at describing a sequential synthesis coupled to an extensive analysis in order to study the morphological evolution of a {100}{111}< 100 > textured diamond film. We compare several morphological parameters obtained by in situ optical methods and ex situ characterizations. The texture formation is found to be correlated with a significant increase in the growth rate of the film. In addition, morphology reconstruction of polycrystalline film is presented from which the R-100 covering ratio of {100} faces is extracted. As a result, a phenomenological model has been developed for real-time growth parameters extraction of the film based on in situ optical measurements.

• 出版日期2016-10
• 单位中国地震局