Fast PEALD ZnO Thin-Film Transistor Circuits

作者：Mourey Devin A^*; Zhao Dalong A; Sun Jie; Jackson Thomas N

来源：IEEE Transactions on Electron Devices, 2010, 57(2): 530-534.

DOI：10.1109/TED.2009.2037178

• Oxide thin-film transistors (TFTs)
• plasma-enhanced atomic layer deposition (PEALD)
• thin-film circuits
• ZnO

We report stable high-mobility ZnO thin-film transistors (TFTs) and fast circuits fabricated using a novel weak reactant plasma-enhanced atomic layer deposition (PEALD) process. This PEALD process is a highly scalable manufacturable process and is a faster and simpler alternative to conventional atomic layer deposition. Using PEALD, we have deposited highly crystalline (002) textured ZnO thin films at a low temperature (200 degrees C). Using PEALD ZnO films, we have fabricated high-mobility TFTs (20-30 cm(2)/V . s), which have < 100-mV threshold voltage shifts after bias stress at 80 degrees C for 20 000 s. Using these high-performance TFTs, we have also fabricated simple 15-stage ring oscillator circuits with a propagation delay of 22 ns/stage for a supply voltage of 16 V, which, to the best of our knowledge, are the fastest ZnO TFT circuits reported to date.

• 出版日期2010-2