Study of the interaction between a zirconium thin film and an EN C100 steel substrate: Temperature effect

作者：Benouareth Karim^*; Tristant Pascal; Jaoul Cedric; Le Niniven Christophe; Nouveau Corinne; Dublanche Tixier Christelle; Bouabellou Abderrahmane

来源：Vacuum, 2016, 125: 234-239.

DOI：10.1016/j.vacuum.2015.11.002

• Zirconium carbide
• Sputtering
• Heat treatment
• Diffusion
• Hardness

Zirconium thin films were grown on high carbon steel substrates EN C100 (1%wt. of carbon) by RF magnetron sputtering. In order to study the diffusivity of the film/substrate system as a function of the temperature, 1 h vacuum annealing was carried out for different temperatures between 600 degrees C and 1100 degrees C. The films were then analyzed by X-ray diffraction, scanning electron microscopy, glow discharge optical emission spectroscopy (GDOES) and nanoindentation.
The obtained results showed a progressive transformation of zirconium film to.zirconium carbide. Carbon atoms diffusion from substrate toward the film induced this transformation. The sample annealed at 900 C exhibited the best mechanical properties (H = 17 GPa and E = 220 GPa). Samples treated at higher temperature were affected by oxidation and high microporosity. Even if the conversion is incomplete, annealing significantly promotes adhesion of the film on the substrate.

• 出版日期2016-3