科研之友
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摘要
A two-dimensional fluid simulator for a SiH4 discharge in transformer coupled plasma (TCP) sources is developed. The simulator is based on the fluid equations for electrons, positive ions, negative ions, neutral species, and radicals, and the absorbed power by electrons is determined by using an electron heating model including the anomalous skin effect. Using the developed simulator, we investigated the spatial dependences of the densities for charged particles and radicals, and the electron temperature.
- 出版日期2010-12
