科研之友
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摘要
A micro-crack in silicon was experimentally investigated using high-resolution transmission electron microscopy (HRTEM). The crystal lattice structure of a micro-crack was carefully observed at a HRTEM image scale of approximately 18 nm. The crystal lattice structure of the crack tip region was observed to be regular with good periodicity. The HRTEM images of the micro-crack demonstrate that the microcrack cleavage expands along two crystal planes, where the principal cleavage plane is the (111) crystal plane.
- 出版日期2008-12-15
- 单位内蒙古工业大学
