Nanosecond Pulsed Laser Ablation of Copper in Supercritical Carbon Dioxide

作者：Kuwahara Yutaka^*; Saito Takashi; Haba Minori; Iwanaga Tomoki; Sasaki Mitsuru; Goto Motonobu

来源：Japanese Journal of Applied Physics, 2009, 48(4): 040207.

DOI：10.1143/JJAP.48.040207

A copper target in supercritical CO(2) was ablated using nanosecond Nd:YAG laser pulses for a variety of different laser irradiation times, temperatures and pressures. The irradiated copper surface was evaluated by scanning electron microscopy and laser microscopy. Experiments were also conducted in atmospheric conditions with air and liquid hexane to evaluate the environmental dependence of ablation. The results demonstrated that laser ablation of a metal target in high pressure was affected by the pressure and the surrounding environment. An ablation crater with a depth of 6.9 mu m was produced by ablating at a temperature of 40 degrees C, a pressure of 25 MPa, and an irradiation time of 500s.

• 出版日期2009-4