A General Line-Line Method for Dielectric Material Characterization Using Conductors With the Same Cross-Sectional Geometry

作者:Bao Xiue*; Liu Song; Ocket Ilja; Bao Juncheng; Schreurs Dominique; Zhang Shengkang; Cheng Chunyue; Feng Keming; Nauwelaers Bart
来源:IEEE Microwave and Wireless Components Letters, 2018, 28(4): 356-358.
DOI:10.1109/LMWC.2018.2809041

摘要

This letter presents a general "line-line" (LL) method for measuring dielectric material's permittivity using transmission lines. Like the previous LL methods, the proposed method needs a fully characterized transmission line as a reference. Different from previous methods, the reference line can be loaded with an arbitrary material and can be of an arbitrary length. The proposed method is validated with on-wafer dielectric fluid measurement up to 50 GHz, and measurement results of pure water agree well with literature values.

  • 出版日期2018-4
  • 单位北京无线电计量测试研究所