Microstructural, thermal and mechanical behavior of co-sputtered binary Zr-Cu thin film metallic glasses

作者：Apreutesei M; Steyer P^*; Joly Pottuz L; Billard A; Qiao J; Cardinal S; Sanchette F; Pelletier J M; Esnouf C

来源：Thin Solid Films, 2014, 561: 53-59.

DOI：10.1016/j.tsf.2013.05.177

• Thin film metallic glasses
• Magnetron sputtering
• In situ X-ray diffraction
• Thermal stability
• Microstructure
• Mechanical properties

Bulk metallic glasses have attracted considerable attention over the last decades for their outstanding mechanical features (high strength, super-elasticity) and physico-chemical properties (corrosion resistance). Recently, some attempts to assign such original behavior from bulk materials to modified surfaces have been reported in the literature based on multicomponent alloys.
In this paper we focused on the opportunity to form a metallic glass coating from the binary Zr-Cu system using a magnetron co-sputtering physical vapor deposition process. The composition of the films can be easily controlled by the relative intensities applied to both pure targets, which made possible the study of the whole Zr-Cu system (from 13.4 to 85.0 at.% Cu). The chemical composition of the films was obtained by energy dispersive X-ray spectroscopy, and their microstructure was characterized by scanning and transmission electron microscopy. The thermal stability of the films was deduced from an in situ X-ray diffraction analysis (from room temperature up to 600 degrees C) and correlated with the results of the differential scanning calorimetry technique. Their mechanical properties were determined by nanoindentation experiments.

• 出版日期2014-6-30