MEMS Closed-Loop Control Incorporating a Memristor as Feedback Sensing Element

作者：Almeida Sergio F; Mireles Jose Jr; Garcia Ernest J; Zubia David

来源：IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS II-EXPRESS BRIEFS, 2016, 63(3): 294-298.

DOI：10.1109/TCSII.2015.2504258

• Circuit simulation
• closed-loop control
• feedback
• memristor
• microelectromechanical systems (MEMS)
• micromechanical devices

In this brief, the integration of a memristor with a microelectromechanical systems (MEMS) parallel plate capacitor coupled by an amplification stage is simulated. It is shown that the MEMS upper plate position can be controlled up to 95% of the total gap. Due to its common operation principle, the change in the MEMS plate position can be interpreted by the change in the memristor resistance or memristance. A memristance modulation of similar to 1 k Omega was observed. A polynomial expression representing the MEMS upper plate displacement as a function of the memristance is presented. Thereafter, a simple design for a voltage closed-loop control is presented, showing that the MEMS upper plate can be stabilized up to 95% of the total gap by using the memristor as a feedback sensing element. The memristor can play important dual roles in overcoming the limited operation range of MEMS parallel plate capacitors and in simplifying read-out circuits of those devices by representing the motion of the upper plate in the form of resistance change instead of capacitance change.

• 出版日期2016-3