MECHANICAL PROPERTIES OF THIN FILMS DEPOSITED BY TVA AND G-TVA METHODS

作者：Stoica Adrian^*; Vladoiu Rodica; Musa Geavit; Ciupina Victor; Contulov Mirela; Bursikova Vilma; Blahova Olga

来源：Chemicke Listy, 2011, 105: S132-S135.

• Thermionic Vacuum Arc
• Gaseous Thermionic Vacuum Arc
• DLC coatings
• nanoindentation

The Thermionic Vacuum Arc (TVA) plasma is a powerful technique able to growth thin films using solids as precursor in vacuum conditions. A large range of materials, even refractory metals were successfully deposited using this technique. In this paper an extension of TVA method from gases (G- TVA) for DLC synthesis is reported. The novelty consists in using a flow of methane, instead of the carbon rod used as anode in the classic TVA method. This expands enormously the applicability of the TVA technique for the synthesis of thin films from solids to gas precursors. The mechanical properties of the films deposited were investigated. The described methods enable to prepare carbon films with wide range of mechanical properties from polymer-like carbon up to hard diamond-like carbon.

• 出版日期2011