An equation-based nonlinear model for non-flat MEMS fixed-fixed beams with non-vertical anchoring supports

作者：Zeng Juan^*; Garg Anurag; Kovacs Andrew; Bajaj Anil K; Peroulis Dimitrios

来源：Journal of Micromechanics and Microengineering, 2015, 25(5): 055018.

DOI：10.1088/0960-1317/25/5/055018

• MEMS fixed-fixed beams
• inclined supports
• support compliance
• residual stress
• electrostatic actuation
• nonlinear stretching
• displacement-voltage measurement

Anchor supports in MEMS beams are often far from the ideally assumed built-in or step-up conditions. Practical fabrication processes often result in non-vertical anchoring supports (referred to as inclined supports in the following text) which significantly influence the post-release performance of the beam. This paper brings attention to the presence of the inclined supports in surface micromachined fixed-fixed beams and models the mechanical and electromechanical effects of inclined supports for the first time. Specifically, we calculate and validate the effects of residual stress and loading on the post-release beam behavior including their nonlinear large-displacement characteristics. In addition the model accounts for non-flat beam profiles caused by residual stress and/or a non-flat sacrificial layer profile. Inclined supports are modeled as cantilever beams connected to a horizontal beam. The Euler-Bernoulli equations for all beams are simultaneously solved to calculate the axial stress of the horizontal beam and the axial, translational, and rotational compliance of the supports. Nonlinear effects due to stretching and residual stress are also included. The calculated beam displacements agree with FEM models to within 1.1% in both the linear and nonlinear regimes. Furthermore, experimentally-obtained displacements of six fabricated beams with inclined supports agree to within 5.2% with the presented model.

• 出版日期2015-5