Activation energy of water vapor and oxygen transmission through TiNxOy/PET gas barrier films

作者：Lin M C; Chen M J; Chang L S^*

来源：Applied Surface Science, 2010, 256(23): 7242-7245.

DOI：10.1016/j.apsusc.2010.05.058

• Titanium oxynitride film
• Reactive magnetron sputtering
• Polyethylene terephthalate
• Gas permeation
• Activation energy

Titanium oxynitride (TiNxOy) films were deposited on polyethylene terephthalate (PET) substrates by means of a reactive radio frequency (RF) magnetron sputtering system in which the power density was the varied parameter. Experimental results show that the deposited TiNxOy films with a thickness of about 55 nm have similar contents of TiN, TiNxOy and TiO2 bonds, although they are deposited at different power densities. The TiNxOy films deposited at a lower power density have fewer internal defects and grain boundaries and possess higher activation energy and a lower rate of water vapor and oxygen transmission through TiNxOy/PET films.

• 出版日期2010-9-15