Development of easy-debonding IGZO TFT array on flexible PI substrate at low temperature

作者：Li Xi Feng; Zhu Le Yong; Chen Long Long; Shi Ji Feng; Sun Xiang; Zhang Jian Hua^*; Xin En Long; Chen Cheng Chung; Zang Hao Chun; Huo Si Tao; Ling Zhi Hua; Ma Jun

来源：Digest of Technical Papers - SID International Symposium, 2014, 45(1): 983-985.

DOI：10.1002/j.2168-0159.2014.tb00255.x

• Active matrix displays
• Additional equipment
• Device performance
• easy-debonding
• Electrical characteristic
• IGZO TFT
• Operation stability
• Portable applications

Active Matrix displays on light weight, non-fragile, plastic substrates are of great interests for portable applications. One of the challenges has been device performance processed at low temperature: in both carrier mobility and operation stability. Another challenge has been bonding-debonding efficiency. IGZO TFT array was fabricated on a lamination-based polyimide (PI) flexible substrate at 200°C and is easily debonded without additional equipment. Good electrical characteristic and high stability of the IGZO TFT have been demonstrated.

• 出版日期2014
• 单位上海大学