A non-destructive method for measuring the mechanical properties of ultrathin films prepared by atomic layer deposition

作者：Zhang Qinglin; Xiao Xingcheng^*; Cheng Yang Tse; Verbrugge Mark W

来源：Applied Physics Letters, 2014, 105(6): 061901.

DOI：10.1063/1.4892539

The mechanical properties of ultrathin films synthesized by atomic layer deposition (ALD) are critical for the liability of their coated devices. However, it has been a challenge to reliably measure critical properties of ALD films due to the influence from the substrate. In this work, we use the laser acoustic wave (LAW) technique, a non-destructive method, to measure the elastic properties of ultrathin Al2O3 films by ALD. The measured properties are consistent with previous work using other approaches. The LAW method can be easily applied to measure the mechanical properties of various ALD thin films for multiple applications.

• 出版日期2014-8-11