A scanning acoustic microscope based on picosecond ultrasonics

作者：Che S; Guduru P R; Nurmikko A V; Maris H J^*

来源：Ultrasonics, 2015, 56: 153-159.

DOI：10.1016/j.ultras.2014.02.010

• Acoustic microscope
• Acoustic lens

We report on the development of a new type of scanning acoustic microscope. We use a femtosecond light pulse to generate a short sound pulse, and then focus this sound onto the sample by means of a specially designed and microfabricated acoustic lens of radius a few microns. The sound travels to the sample through a thin layer of water. The sound reflected from the sample is collected by the lens and then passes through a monolithically integrated optical resonant cavity. The induced change in the properties of this cavity are measured using a time-delayed probe light pulse. We describe some of the challenges involved in the construction and operation of this high-precision metrology apparatus and present some preliminary results.

• 出版日期2015-2