A markov property considered data generation approach for etchers fault detection test????(Open Access)

作者：Yang, Jungang; Zhang, Jie; Ma, Yihua; Wang, Zhiyu

来源：Journal of Applied Sciences, 2013, 13(21): 4695-4701.

DOI：10.3923/jas.2013.4695.4701

• Effectiveness and efficiencies
• Etcher
• Markov property
• Random data generations
• Semiconductor manufacturing
• Semiconductor wafer fabrication system
• Statistical information
• Test data generation

The objective of this research was to investigate the process features of etchers and automatically provide mass multi-characteristics data for fault detection test. Before applying a fault detection system in a modern semiconductor wafer fabrication system, a great number of experiments and tests must be carried out to ensure the effectiveness and efficiency of the system. However, it is difficult to collect and storage different types of data with different characteristics for testing. This study proposed a Markov Property considered data generation approach based on analysis of the process state changes in etchers. The markov property of etcher's state changes was demonstrated and a data generation model was built. Comparing with the existed historical data based data generation method and random data generation method, the proposed method considered not only statistical information from historical data but also the impact of the etchers'state changes. Experiments and industrial examples were used to measure the performance of the proposed method and results show that it has advantages such as simple expression, rapid and automatic data generation and easy reconfiguration, therefore is especially useful for the Fault Detection system test and simulation.

• 出版日期2013
• 单位上海交通大学