HFCVD nanostructured diamond films deposited by a combination of seeding suspensions and novel nucleation process

作者：Mukherjee Debarati; Polini Riccardo; Valentini Veronica; Rotter Shlomo Zalka; Mendes Joana Catarina^*

来源：International Journal of Surface Science and Engineering, 2017, 11(3): 225-240.

DOI：10.1504/IJSURFSE.2017.10006721

• HFCVD
• novel nucleation process
• NNP
• nanodiamond
• seeding

The ultrasonic seeding of a substrate with diamond suspensions enriches the surface with nanometre-sized seeds that coalesce and form a closed conformal film during early stages of diamond growth. To get insight on seeds early growth and evaluate the seeding efficiency of different suspensions, silicon samples were exposed to diamond growth conditions before seeding; this leaves a thin carbon film on the substrate surface. Following this step samples were seeded with commercial nanodiamond suspensions, exposed again to growth conditions and characterised by SEM. Results showed that seeding suspensions played a role depending on particle size and nature of dispersing medium. Seeding density was larger and more uniform in samples pre-exposed to diamond growth conditions. The carbon film deposited during the pre-treatment improves deagglomeration of nanodiamond seeds via a more effective interaction between substrate surface and seeds. This procedure represents a viable way to grow thin conformal diamond coatings by HFCVD.

• 出版日期2017